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1

Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces

Gkouzou, A., Janssen, G.C.A.M., van Spengen, W.M.

Journal:

Sensors and Actuators A: Physical

Year:

2020

Language:

english

File:

PDF, 3.67 MB

english, 2020

2

MEMS reliability from a failure mechanisms perspective

W Merlijn van Spengen

Journal:

Microelectronics Reliability

Year:

2003

Language:

english

File:

PDF, 478 KB

english, 2003

3

[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

Buja, Federico, Kokorian, Jaap, Sumant, Anirudha V., van Spengen, W. Merlijn

Year:

2014

Language:

english

File:

PDF, 478 KB

english, 2014

4

Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations

W. Merlijn van Spengen, R. Puers, R. Mertens, Ingrid De Wolf

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 968 KB

english, 2004

5

Techniques to study the reliability of metal RF MEMS capacitive switches

I. De Wolf, W.M. van Spengen

Journal:

Microelectronics Reliability

Year:

2002

File:

PDF, 3.17 MB

2002

6

Static crack growth and fatigue modeling for silicon MEMS

W. Merlijn van Spengen

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 1.02 MB

english, 2012

7

The prediction of stiction failures in MEMS

van Spengen, W.M., Puers, R., De Wolf, I.

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2003

Language:

english

File:

PDF, 342 KB

english, 2003

8

A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches

Spengen, W Merlijn van, Puers, Robert, Mertens, Robert, Wolf, Ingrid De

Journal:

Journal of Micromechanics and Microengineering

Year:

2003

Language:

english

File:

PDF, 331 KB

english, 2003

9

Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Buja, Federico, Kokorian, Jaap, Sumant, Anirudha V., van Spengen, W. Merlijn

Journal:

Diamond and Related Materials

Year:

2015

Language:

english

File:

PDF, 1.52 MB

english, 2015

10

In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope

Kokorian, Jaap, Buja, Federico, van Spengen, Willem Merlijn

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 2.24 MB

english, 2015

11

The MEMSamp: using (RF-)MEMS switches for the micromechanical amplification of electronic signals

W. M. Van Spengen, S. B. Roobol, W. P. Klaassen, T. H. Oosterkamp

Year:

2010

Language:

english

File:

PDF, 1.31 MB

english, 2010

12

Structural Characteristics of Underdevelopment in the Mafia Archipelago: An Historical Analysis (Caractéristiques structurelles du sous-développement dans l'archipel de Mafia: analyse historique)

Wim Van Spengen

Journal:

Cahiers d études africaines

Year:

1980

Language:

english

File:

PDF, 1015 KB

english, 1980

13

MEMS-based fast scanning probe microscopes

F.C. Tabak, E.C.M. Disseldorp, G.H. Wortel, A.J. Katan, M.B.S. Hesselberth, T.H. Oosterkamp, J.W.M. Frenken, W.M. van Spengen

Journal:

Ultramicroscopy

Year:

2010

Language:

english

File:

PDF, 880 KB

english, 2010

14

The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

W. Merlijn van Spengen, Joost W. M. Frenken

Journal:

Tribology Letters

Year:

2007

Language:

english

File:

PDF, 589 KB

english, 2007

15

The investigation of microsystems using Raman spectroscopy

Ingrid De Wolf, Chen Jian, W.Merlijn van Spengen

Journal:

Optics and Lasers in Engineering

Year:

2001

Language:

english

File:

PDF, 333 KB

english, 2001

16

Video-rate scanning probe control challenges: setting the stage for a microscopy revolution

M. J. Rost, G. J. C. van Baarle, A. J. Katan, W. M. van Spengen, P. Schakel, W. A. van Loo, T. H. Oosterkamp, J. W. M. Frenken

Journal:

Asian Journal of Control

Year:

2009

Language:

english

File:

PDF, 881 KB

english, 2009

17

[IEEE 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. - San Jose, CA, USA (April 17-21, 2005)] 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. - The influence of the package environment on the functioning and reliability of RF-MEMS switches

van Spengen, W.M., Czarnecki, P., Poets, R., van Beek, J.T.M., De Wolf, I.

Year:

2005

Language:

english

File:

PDF, 808 KB

english, 2005

18

Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations

van Spengen, W M

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 3.96 MB

english, 2012

19

A physical model to predict stiction in MEMS

Spengen, W Merlijn van, Puers, Robert, Wolf, Ingrid De

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 479 KB

english, 2002

20

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Materials and Device Characterization in Micromachining III - Auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness

van Spengen, W. Merlijn, De Wolf, Ingrid, Puers, Bob, Vladimirsky, Yuli, Coane, Philip J.

Year:

2000

Language:

english

File:

PDF, 166 KB

english, 2000

21

[IEEE IEEE International Electron Devices Meeting - San Francisco, CA, USA (8-11 Dec. 2002)] Digest. International Electron Devices Meeting, - Experimental characterization of stiction due to charging in RF MEMS

van Spengen, W.M., Puers, R., Mertens, R., De Wolf, I.

Year:

2002

Language:

english

File:

PDF, 325 KB

english, 2002

22

A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches

Spengen, W Merlijn van, Puers, Robert, Mertens, Robert, Wolf, Ingrid De

Journal:

Journal of Micromechanics and Microengineering

Year:

2004

Language:

english

File:

PDF, 1.03 MB

english, 2004

23

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Materials and Device Characterization in Micromachining III - Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy

van Spengen, W. Merlijn, De Wolf, Ingrid, Knechtel, Roy, Vladimirsky, Yuli, Coane, Philip J.

Year:

2000

Language:

english

File:

PDF, 420 KB

english, 2000

24

Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators

Buja, Federico, Sumant, Anirudha V., Kokorian, Jaap, van Spengen, W. Merlijn

Journal:

Sensors and Actuators A: Physical

Year:

2014

Language:

english

File:

PDF, 468 KB

english, 2014

25

A comparative analysis of cereal production and consumption patterns in semi-arid India

Put, M., van Spengen, W.

Journal:

Journal of Rural Studies

Year:

1988

Language:

english

File:

PDF, 1.46 MB

english, 1988

26

[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - A reliable and compact polymer-based package for capacitive RF-MEMS switches

Oya, Y., Okubora, A., Van Spengen, M., Soussan, P., Stoukatch, S., Rottenberg, X., Ratchev, P., Tilmans, H., De Raedt, W., Beyne, E., De Moor, P., De Wolf, I., Bae, K.

Year:

2004

Language:

english

File:

PDF, 299 KB

english, 2004

27

On the physics of stiction and its impact on the reliability of microstructures

Van Spengen, W. Merlijn, Puers, Robert, De Wolf, Ingrid

Journal:

Journal of Adhesion Science and Technology

Year:

2003

Language:

english

File:

PDF, 462 KB

english, 2003

28

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - An optical in-plane displacement measurement technique with sub-nanometer accuracy based on curve-fitting

Kokorian, Jaap, Buja, Federico, Staufer, Urs, van Spengen, W. Merlijn

Year:

2014

Language:

english

File:

PDF, 1.00 MB

english, 2014

29

MEMS-based high speed scanning probe microscopy

Disseldorp, E. C. M., Tabak, F. C., Katan, A. J., Hesselberth, M. B. S., Oosterkamp, T. H., Frenken, J. W. M., van Spengen, W. M.

Journal:

Review of Scientific Instruments

Year:

2010

Language:

english

File:

PDF, 1.07 MB

english, 2010

30

On the noise limit of stress and temperature measurements with micro-Raman spectroscopy

van Spengen, W. Merlijn, Roca, Joan Belles

Journal:

Journal of Raman Spectroscopy

Year:

2013

Language:

english

File:

PDF, 1.04 MB

english, 2013

31

Response to “Comment on ‘MEMS-based high speed scanning probe microscopy’” [Rev. Sci. Instrum. 81, 117101 (2010)]

Disseldorp, E. C. M., Tabak, F. C., Katan, A. J., Hesselberth, M. B. S., Oosterkamp, T. H., Frenken, J. W. M., van Spengen, W. M.

Journal:

Review of Scientific Instruments

Year:

2010

Language:

english

File:

PDF, 319 KB

english, 2010

32

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Nitrogen incorporated ultrananocrystalline diamond thermal actuators: Design, fabrication and actuation

Buja, F., Sumant, A. V., van Spengen, W. M.

Year:

2013

Language:

english

File:

PDF, 1.26 MB

english, 2013

33

COMPENSATION OF THE INTERNAL STRESS GRADIENT IN ULTRANANOCRYSTALLINE DIAMOND FOR THE FABRICATION OF MICROACTUATORS AND TRIBOMETERS ON A CHIP

Buja, Federico, Divan, Ralu, Sumant, Anirudha V., Czaplewski, David, van Spengen, W. Merlijn

Journal:

MRS Proceedings

Year:

2013

Language:

english

File:

PDF, 684 KB

english, 2013

34

Microscale Friction Reduction by Normal Force Modulation in MEMS

van Spengen, W. M., Wijts, G. H. C. J., Turq, V., Frenken, J. W. M.

Journal:

Journal of Adhesion Science and Technology

Year:

2010

Language:

english

File:

PDF, 509 KB

english, 2010

35

Observation of nanoscale adhesion, friction and wear between ALD Al 2 O 3 coated silicon MEMS sidewalls

Buja, Federico, Fiorentino, Giuseppe, Kokorian, Jaap, Spengen, W Merlijn van

Journal:

Year:

2015

Language:

english

File:

PDF, 2.36 MB

english, 2015

36

A method to extract the lateral and normal components of motion from the capacitance change of a moving MEMS comb drive

Spengen, W Merlijn van, Heeres, Erwin C

Journal:

Journal of Micromechanics and Microengineering

Year:

2007

Language:

english

File:

PDF, 730 KB

english, 2007

37

[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Atomic scale adhesion phenomena in a two million cycle sidewall contact experiment

Kokorian, Jaap, Staufer, Urs, van Spengen, W. Merlijn

Year:

2015

Language:

english

File:

PDF, 992 KB

english, 2015

38

Hints of atomic scale phenomena in adhesion and friction measurements with MEMS devices

van Spengen, W. M.

Journal:

Tribology - Materials Surfaces & Interfaces

Year:

2010

Language:

english

File:

PDF, 381 KB

english, 2010

39

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution

van Spengen, W. Merlijn, De Wolf, Ingrid, Puers, Bob, Ramesham, Rajeshuni

Year:

2001

Language:

english

File:

PDF, 323 KB

english, 2001

40

Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests

Buja, Federico, Kokorian, Jaap, Gulotty, Richard, Sumant, Anirudha V, Merlijn van Spengen, W

Journal:

Journal of Micromechanics and Microengineering

Year:

2015

Language:

english

File:

PDF, 2.96 MB

english, 2015

41

SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Advanced Photonic Sensors and Applications - High-resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy

De Wolf, Ingrid, Chen, Jian, Rasras, Mahmoud, van Spengen, W. Merlijn, Simons, Veerle, Lieberman, Robert A., Asundi, Anand K., Asanuma, Hiroshi

Year:

1999

Language:

english

File:

PDF, 1.53 MB

english, 1999

42

A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another ‘identical’ one does not

Merlijn van Spengen, W

Journal:

Journal of Micromechanics and Microengineering

Year:

2015

Language:

english

File:

PDF, 3.21 MB

english, 2015

43

Recent developments in experimental on-chip stiction research: a review

Spengen, W. Merlijn Van

Journal:

International Journal of Computational Materials Science and Surface Engineering

Year:

2009

Language:

english

File:

PDF, 1000 KB

english, 2009

44

Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating

Gkouzou, A, Kokorian, J, Janssen, G C A M, van Spengen, W M

Journal:

Journal of Micromechanics and Microengineering

Year:

2016

Language:

english

File:

PDF, 2.24 MB

english, 2016

45

Improved analysis and visualization of friction loop data: unraveling the energy dissipation of meso-scale stick-slip motion

Kokorian, Jaap, van Spengen, Merlijn

Journal:

Measurement Science and Technology

Year:

2017

Language:

english

File:

PDF, 7.10 MB

english, 2017

46

Friction and dynamically dissipated energy dependence on temperature in polycrystalline silicon MEMS devices

Gkouzou, A., Kokorian, J., Janssen, G. C. A. M., van Spengen, W. M.

Journal:

Microsystem Technologies

Year:

2017

Language:

english

File:

PDF, 2.47 MB

english, 2017

47

The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic Prandtl–Tomlinson model and the simulation of vibration-induced friction reduction

van Spengen, W Merlijn, Turq, Viviane, Frenken, Joost W M

Journal:

Beilstein Journal of Nanotechnology

Year:

2010

Language:

english

File:

PDF, 2.20 MB

english, 2010

48

Corrigendum: Improved analysis and visualization of friction loop data: unraveling the energy dissipation of meso-scale stick–slip motion (2017 Meas. Sci. Technol . 28 115011)

Kokorian, Jaap, van Spengen, W Merlijn

Journal:

Measurement Science and Technology

Year:

2019

File:

PDF, 979 KB

2019

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